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Catalogue Tag Display
Catalogue Tag Display
MARC 21
Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena
Tag
Description
022
$a1071-1023
082
$a530
099
$aLibrary storage
245
$aJournal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena$hS
260
$aNew York, NY$bAmerican Institute of Physics$c1991-
500
$aContinuazione di : "Journal of vacuum science & technology. B : Microelectronics and nanometer structures"
710
$aAmerican Vacuum Society
780
$aJournal of vacuum science and technology B
785
$aJournal of vacuum science and technology A & B [CD-ROM ed.]
905
$aCondensed matter sector
925
$aser.2 : 9 (1991) - 13 (1995); Library storage
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