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MARC 21

Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena
Tag Description
022$a1071-1023
082$a530
099$aLibrary storage
245$aJournal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena$hS
260$aNew York, NY$bAmerican Institute of Physics$c1991-
500$aContinuazione di : "Journal of vacuum science & technology. B : Microelectronics and nanometer structures"
710$aAmerican Vacuum Society
780$aJournal of vacuum science and technology B
785$aJournal of vacuum science and technology A & B [CD-ROM ed.]
905$aCondensed matter sector
925$aser.2 : 9 (1991) - 13 (1995)- Library storage
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