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Proceedings of the Second International Symposium on Process physics and modeling in semiconductor technology

Catalogue Information
Field name Details
Dewey Class 538.9
Title Proceedings of the Second International Symposium on Process physics and modeling in semiconductor technology / edited by G.R. Srinivasan, J.D. Plummer, S.T. Pantelides
(M)
Added Personal Name Srinivasan, G.R.
Plummer, J.D.
Pantelides, Sokrates T.
Other name(s) Electrochemical Society
International Symposium on Process Physics and Modeling in Semiconductor Technology (2nd : 1990 : Montréal, Québec)
Publication Pennington, NJ : Electrochemical Society , c1991
Physical Details x, 800 p. : ill. ; 23 cm.
Series Proceedings / Electrochemical Society ; 91-4
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Catalogue Information 11861 Beginning of record . Catalogue Information 11861 Top of page .
Item Information
Barcode Shelf Location Collection Volume Ref. Branch Status Due Date
00000000061432 538.9 PRO 1990
General   SISSA . . Available .  
. Catalogue Record 11861 ItemInfo Beginning of record . Catalogue Record 11861 ItemInfo Top of page .

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