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Proceedings of the Second International Symposium on Process physics and modeling in semiconductor technology
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538.9
Title
Proceedings of the Second International Symposium on Process physics and modeling in semiconductor technology / edited by G.R. Srinivasan, J.D. Plummer, S.T. Pantelides
(M)
Added Personal Name
Srinivasan, G.R.
Plummer, J.D.
Pantelides, Sokrates T.
Other name(s)
Electrochemical Society
International Symposium on Process Physics and Modeling in Semiconductor Technology (2nd : 1990 : Montréal, Québec)
Publication
Pennington, NJ : Electrochemical Society , c1991
Physical Details
x, 800 p. : ill. ; 23 cm.
Series
Proceedings / Electrochemical Society
; 91-4
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Subject References:
Semiconductors
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Authors:
Pantelides, Sokrates T.
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Plummer, J.D.
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Srinivasan, G.R.
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Corporate Authors:
Electrochemical Society
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International Symposium on Process Physics and Modeling in Semiconductor Technology (2nd : 1990 : Montréal, Québec)
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Series:
Proceedings / Electrochemical Society
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Classification:
538.9
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538.9 PRO 1990
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00000000061432
538.9 PRO 1990
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