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Field name	Details
Dewey Class	621.38152 (DDC 22)
Title	Introduction to Focused Ion Beams (EB) : Instrumentation, Theory, Techniques and Practice / edited by Lucille A. Giannuzzi, Fred A. Stevie.
Added Personal Name	Stevie, Fred A.
Added Personal Name	Giannuzzi, Lucille A.
Other name(s)	SpringerLink (Online service)
Publication	Boston, MA : Springer , 2005.
Physical Details	: v.: digital
ISBN	9780387233130
Summary Note	The Focused Ion Beam Instrument.- Ion - Solid Interactions.- Focused Ion Beam Gases for Deposition and Enhanced Etch.- Three-Dimensional Nanofabrication Using Focused Ion Beams.- Device Edits and Modifications.- The Uses of Dual Beam FIB in Microelectronic Failure Analysis.- High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy.- FIB for Materials Science Applications - a Review.- Practical Aspects of FIB Tem Specimen Preparation.- FIB Lift-Out Specimen Preparation Techniques.- A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method.- Dual-Beam (FIB-SEM) Systems.- Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS).- Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy.- Application of FIB in Combination with Auger Electron Spectroscopy.:
System details note	Online access to this digital book is restricted to subscription institutions through IP address (only for SISSA internal users)
Internet Site	http://dx.doi.org/10.1007/b101190
Links to Related Works	Subject References: Condensed matter . Focused ion beams . Optical materials . Particles (Nuclear physics) . Surfaces (Physics) . Authors: Giannuzzi, Lucille A. . Stevie, Fred A. . Corporate Authors: SpringerLink (Online service) . Classification: 621.38152 (DDC 22) .

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Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice

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