LIBERO WebOPAC Catalogue Display (W561)

Catalogue Information
Field name	Details
Dewey Class	530
Title	Journal of vacuum science & technology. B : Microelectronics and nanometer structures (S)
Holdings	ser.2 : 1 (1983) - 7 (1989)- Microfilm
Holdings	ser.2 : 8 (1990)- Library storage
Other name(s)	American Vacuum Society
Publication	New York, NY : American Institute of Physics , 1983-1990.
Note	Continuazione in parte di : "Journal of vacuum science & technology" (dal 1983) ; Continuato da : "Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena
Links to Related Works	There are no related Subjects for this title: Corporate Authors: American Vacuum Society . Classification: 530 .

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