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Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena

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Dewey Class 530
Title Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena (S)
Holdings ser.2 : 9 (1991) - 13 (1995)- Library storage
Other name(s) American Vacuum Society
Publication New York, NY : American Institute of Physics , 1991-
Note Continuazione di : "Journal of vacuum science & technology. B : Microelectronics and nanometer structures"
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