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Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena
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Catalogue Record 325
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Catalogue Information
Nome campo
dettagli
Dewey Class
530
Titolo
Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena (S)
Holdings
ser.2 : 9 (1991) - 13 (1995)- Library storage
Other name(s)
American Vacuum Society
Pubblicazione
New York, NY : American Institute of Physics , 1991-
Nota
Continuazione di : "Journal of vacuum science & technology. B : Microelectronics and nanometer structures"
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American Vacuum Society
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