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Title: Journal of vacuum science & technology. B : Microelectronics and nanometer structures (S) Dewey Class: 530 Holdings: ser.2 : 1 (1983) - 7 (1989)- Microfilm ser.2 : 8 (1990)- Library storage Publication: New York, NY : American Institute of Physics, 1983-1990. Other name(s): American Vacuum Society ISSN: 0734-211X Note: Continuazione in parte di : "Journal of vacuum science & technology" (dal 1983) ; Continuato da : "Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena ------------------------------ *** There are no holdings for this record *** -----------------------------------------------
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