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Catalogue Tag Display
Catalogue Tag Display
MARC 21
Journal of vacuum science & technology. B : Microelectronics and nanometer structures
Tag
Description
022
$a0734-211X
082
$a530
099
$aLibrary archive : microfilm ; Library storage
245
$aJournal of vacuum science & technology. B : Microelectronics and nanometer structures$hS
260
$aNew York, NY$bAmerican Institute of Physics$c1983-1990.
500
$aContinuazione in parte di : "Journal of vacuum science & technology" (dal 1983) ; Continuato da : "Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena
710
$aAmerican Vacuum Society
780
$aJournal of vacuum science and technology
785
$aJournal of vacuum science and technology B
905
$aCondensed matter sector
925
$aser.2 : 1 (1983) - 7 (1989)- Microfilm
925
$aser.2 : 8 (1990)- Library storage
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