Shortcuts
SISSA Library . Default .
PageMenu- Main Menu-
Page content

Catalogue Tag Display

MARC 21

Journal of vacuum science & technology. B : Microelectronics and nanometer structures
Tag Description
022$a0734-211X
082$a530
099$aLibrary archive : microfilm ; Library storage
245$aJournal of vacuum science & technology. B : Microelectronics and nanometer structures$hS
260$aNew York, NY$bAmerican Institute of Physics$c1983-1990.
500$aContinuazione in parte di : "Journal of vacuum science & technology" (dal 1983) ; Continuato da : "Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena
710$aAmerican Vacuum Society
780$aJournal of vacuum science and technology
785$aJournal of vacuum science and technology B
905$aCondensed matter sector
925$aser.2 : 1 (1983) - 7 (1989)- Microfilm
925$aser.2 : 8 (1990)- Library storage
Quick Search